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Proceedings Paper

Friction and wear in surface-micromachined tribological test devices
Author(s): Donna Cowell Senft; Michael T. Dugger
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Paper Abstract

We report on the design, construction, and initial testing of surface micromachined devices for the measurement of friction and wear. The devices measure friction coefficients on both horizontal deposited polysilicon surfaces and vertical etched polysilicon surfaces. The contact geometry of the rubbing surfaces is well-defined, and a method is presented for the determination of the normal and frictional forces. Initial observations on test devices which have been dried with supercritical CO2 and devices coated with octadecyltrichlorosilane suggest that the coatings increase the lifetime of the devices and the repeatability of the results.

Paper Details

Date Published: 5 September 1997
PDF: 8 pages
Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); doi: 10.1117/12.284533
Show Author Affiliations
Donna Cowell Senft, Sandia National Labs. (United States)
Michael T. Dugger, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 3224:
Micromachined Devices and Components III
Kevin H. Chau; Patrick J. French, Editor(s)

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