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Proceedings Paper

Characteristic analysis of basic mechanisms with large deflective elastic hinges for three-dimensional micromechanisms
Author(s): Mikio Horie; Daiki Kamiya; Kozo Ikegami
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Paper Abstract

In this paper, a basic mechanism of 3D micromechanisms is proposed by making use of number synthesis of mechanisms. The output point of the proposed mechanism can move in the vertical direction when two linear input points move in the inverse horizontal direction, and can move horizontal direction when two linear input points move in the same horizontal direction. The validity and the characteristics of the proposed mechanism are investigated theoretically and experimentally by using a polyethylene macromodel manufactured by a small modeling injection machine. Finally, an example of a micromechanism manufactured by semiconductor fine-machining technique is shown.

Paper Details

Date Published: 5 September 1997
PDF: 12 pages
Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); doi: 10.1117/12.284532
Show Author Affiliations
Mikio Horie, Tokyo Institute of Technology (Japan)
Daiki Kamiya, Tokyo Institute of Technology (Japan)
Kozo Ikegami, Tokyo Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 3224:
Micromachined Devices and Components III
Kevin H. Chau; Patrick J. French, Editor(s)

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