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Proceedings Paper

MEMS CAD and foundries: where are we going?
Author(s): Jean Michel Karam
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Paper Abstract

Besides foundry facilities, computer-aided design tools are also required to potentially move integrated MEMS from research prototypes to an industrial market. This paper presents the different available facilities for low cost collective manufacturing of MEMS and reports on the various significant developments of MEMS design environments. Making the inventory of these activities illustrates how the industry is answering the question of will MEMS technology delivers.

Paper Details

Date Published: 5 September 1997
PDF: 6 pages
Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); doi: 10.1117/12.284520
Show Author Affiliations
Jean Michel Karam, Techniques of Informatics and Microelectronics for Computer Architecture (France)

Published in SPIE Proceedings Vol. 3224:
Micromachined Devices and Components III
Kevin H. Chau; Patrick J. French, Editor(s)

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