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Proceedings Paper

Design of a Σ-Δ converter-based automotive sensor
Author(s): Barun K. Kar; Eric Joseph
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Paper Abstract

The design of a second order (Sigma) - (Delta) converter based microaccelerometer is presented in this paper. This converter has a large dynamic range, i.e., can measure acceleration from 0.5 g to 500 g, and provides directly digital output. The force-rebalance circuitry constraints the sensor mass to move within 10 percent of the distance between the polysilicon layers. The system is inherently linear and has a simple electronic interface.

Paper Details

Date Published: 5 September 1997
PDF: 6 pages
Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); doi: 10.1117/12.284503
Show Author Affiliations
Barun K. Kar, Motorola (United States)
Eric Joseph, Motorola (United States)


Published in SPIE Proceedings Vol. 3224:
Micromachined Devices and Components III
Kevin H. Chau; Patrick J. French, Editor(s)

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