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Proceedings Paper

Balance approach for mechanical properties test of microfabricated structures
Author(s): Xingguo Xiong; Qiang Zou; Deren Lu; Weiyuan Wang
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Paper Abstract

A simple and effective method using a balance to measure micro force and corresponding deflection is presented. The method is proved to be very practical in testing the force-deflection behavior of silicon cantilever, in which the Young's modulus of the material can be calculated, and in investigating the static performance of bulk micromachined capacitive accelerometers. The balance approach for micro force- displacement measurement is very attractive for its easiness in operation, low cost and higher resolution.

Paper Details

Date Published: 5 September 1997
PDF: 9 pages
Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); doi: 10.1117/12.284493
Show Author Affiliations
Xingguo Xiong, Shanghai Institute of Metallurgy (China)
Qiang Zou, Shanghai Institute of Metallurgy (China)
Deren Lu, Shanghai Institute of Metallurgy (China)
Weiyuan Wang, Shanghai Institute of Metallurgy (China)

Published in SPIE Proceedings Vol. 3223:
Micromachining and Microfabrication Process Technology III
Shih-Chia Chang; Stella W. Pang, Editor(s)

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