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Proceedings Paper

SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)
Author(s): Carole Craig Barron; Brady R. Davies; Jeffry J. Sniegowski; M. Steven Rodgers; John H. Comtois; M. Adrian Michalicek
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Paper Abstract

The SAMPLE (Sandia Agile MEMS prototyping, layout tools, and education) service makes Sandia's state-of-the-art surface- micromachining technology, known as SUMMiT, available to U.S. industry for the first time. The Sandia ultra-planar multi- level MEMS technology (SUMMiT) offered through SAMPLE is the world's most advanced surface-micromachining technology, with three independently patternable ultra-low-stress mechanical polysilicon levels (in addition to the electrical polysilicon layer), one-micron design rules, flanged hubs, and CMP planarization of the third sacrificial oxide to provide planar structures in the third mechanical polysilicon layer (MMPoly3). Participants in the SAMPLE program learn about MEMS and SUMMiT process through the Sandia MEMS short course and then use Sandia's specialized design and layout tools to design their own micromachines to be fabricated in SUMMiT.

Paper Details

Date Published: 5 September 1997
PDF: 7 pages
Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); doi: 10.1117/12.284476
Show Author Affiliations
Carole Craig Barron, Sandia National Labs. (United States)
Brady R. Davies, Sandia National Labs. (United States)
Jeffry J. Sniegowski, Sandia National Labs. (United States)
M. Steven Rodgers, Sandia National Labs. (United States)
John H. Comtois, Air Force Phillips Lab. (United States)
M. Adrian Michalicek, Air Force Phillips Lab. (United States)

Published in SPIE Proceedings Vol. 3223:
Micromachining and Microfabrication Process Technology III
Shih-Chia Chang; Stella W. Pang, Editor(s)

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