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Proceedings Paper

Microfabrication technologies for microsystems
Author(s): Nico F. de Rooij
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Paper Abstract

With advances in micromachining and the consequent growing sophistication of microstructures, emphasis is increasingly being laid on the design and realization of complete microsystems. In this paper we show some possible combinations of micromachining technologies to build microsystems for applications in photonics, nanoscience, bio-electrochemical systems and micromechanics. The common point of such a large range of devices is their fabrication technology, which has developed from the basic integrated circuit techniques into a wide spectrum of specific micromachining technologies. This article gives an overview of established and newer microfabrication technologies and their application to the construction of some chosen microsystems.

Paper Details

Date Published: 5 September 1997
PDF: 8 pages
Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); doi: 10.1117/12.284466
Show Author Affiliations
Nico F. de Rooij, Univ. de Neuchatel (Switzerland)

Published in SPIE Proceedings Vol. 3223:
Micromachining and Microfabrication Process Technology III
Shih-Chia Chang; Stella W. Pang, Editor(s)

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