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Proceedings Paper

Ferroelectric thin films by sol-gel processing
Author(s): Donald R. Uhlmann; Gimtong T. Teowee
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Paper Abstract

A wide range of ferroelectric and pyroelectric films have been synthesized using wet chemical processing techniques. With appropriate selection of composition and precursors, and with appropriate use of processing methods to develop desired microstructures, films with exceptional combinations of properties have been prepared. The present paper provides an overview of recent results obtained in our laboratories on ferroelectric and ZnO films, and on the integration of such films into device structures. Specific discussion is directed to the effects of chemistry and important processing variables on the structure and properties of the resulting films. Also discussed are the important aspects of device structures utilizing such films.

Paper Details

Date Published: 2 October 1997
PDF: 13 pages
Proc. SPIE 3136, Sol-Gel Optics IV, (2 October 1997); doi: 10.1117/12.284134
Show Author Affiliations
Donald R. Uhlmann, Univ. of Arizona (United States)
Gimtong T. Teowee, Donnelly Corp. (United States)


Published in SPIE Proceedings Vol. 3136:
Sol-Gel Optics IV
Bruce S. Dunn; John D. Mackenzie; Edward J. A. Pope; Helmut K. Schmidt; Masayuki Yamane, Editor(s)

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