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Proceedings Paper

Debris-free laser plasma source using ice droplets
Author(s): Martin C. Richardson; David Scott Torres; Christopher M. DePriest; Feng Jin; Gregory M. Shimkaveg
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Paper Abstract

We describe the development of a laser-plasma source based on frozen water droplet targets which is essentially debris- free and capable of continuous, high-repetition-rate (> 1 kHz) operation. Created by modest (< 1 J) laser energies, this source produces copious emission at 13 nm and 11.6 nm, the preferred wavelengths for EUV projection lithography, with negligible target operation costs. Extension of this source to other wavelengths is considered.

Paper Details

Date Published: 14 October 1997
PDF: 4 pages
Proc. SPIE 3157, Applications of X Rays Generated from Lasers and Other Bright Sources, (14 October 1997); doi: 10.1117/12.283985
Show Author Affiliations
Martin C. Richardson, CREOL/Univ. of Central Florida (United States)
David Scott Torres, CREOL/Univ. of Central Florida (United States)
Christopher M. DePriest, CREOL/Univ. of Central Florida (United States)
Feng Jin, Lucent Technologies/Bell Labs. (United States)
Gregory M. Shimkaveg, CREOL/Univ. of Central Florida (United States)


Published in SPIE Proceedings Vol. 3157:
Applications of X Rays Generated from Lasers and Other Bright Sources
George A. Kyrala; Jean-Claude J. Gauthier, Editor(s)

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