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Proceedings Paper

Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications
Author(s): Ulf Kleineberg; Hans-Juergen Stock; D. Menke; O. Wehmeyer; Ulrich Heinzmann; Detlef Fuchs; Peter Bulicke; Marco Wedowski; Gerhard Ulm; Klaus F. Heidemann; K. Osterried
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Paper Abstract

We report about the diffraction efficiencies of two new types of multilayer diffraction gratings, one of them being proposed for high spectral dispersion ability due to a high line density in the photon energy range around 90 eV, while the other is being proposed as a multilayer grating working in the water window spectral range around 470 eV at near normal incidence angles. For a 6600 L/mm sinusoidal interference grating coated with 18 Mo/Si doublelayers of d = 8.2 nm absolute diffraction efficiencies up to 11 % at a wavelength .\ = 13.2 nm were measured in each first diffraction order. A 2400 L/mm laminar grating was coated with 60 Ti/C bilayers of d = 2.2 nm for high efficiency in the water window spectral range near the Ti-L edge (.\ = 2.77 nm). For a similar Ti/C multilayer mirror refiectivities of 11 % were measured at a wavelength ) = 2.7 nm and an angle of incidence a = 59 deg. First order diffraction efficiencies of about 0.7 % were measured for the Ti/C multilayer grating.

Paper Details

Date Published: 3 November 1997
PDF: 13 pages
Proc. SPIE 3150, Gratings and Grating Monochromators for Synchrotron Radiation, (3 November 1997); doi: 10.1117/12.283980
Show Author Affiliations
Ulf Kleineberg, Univ. Bielefeld (Germany)
Hans-Juergen Stock, Univ. Bielefeld (Germany)
D. Menke, Univ. Bielefeld (Germany)
O. Wehmeyer, Univ. Bielefeld (Germany)
Ulrich Heinzmann, Univ. Bielefeld (Germany)
Detlef Fuchs, Physikalisch-Technische Bundesanstalt (Germany)
Peter Bulicke, Physikalisch-Technische Bundesanstalt (Germany)
Marco Wedowski, Physikalisch-Technische Bundesanstalt (Germany)
Gerhard Ulm, Physikalisch-Technische Bundesanstalt (Germany)
Klaus F. Heidemann, Carl Zeiss (Germany)
K. Osterried, Carl Zeiss (Germany)


Published in SPIE Proceedings Vol. 3150:
Gratings and Grating Monochromators for Synchrotron Radiation
Wayne R. McKinney; Christopher A. Palmer, Editor(s)

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