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Proceedings Paper

Phase shifting interferometric imaging ellipsometer
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Paper Abstract

An imaging ellipsometer has been developed which employs phase shifting interferometry to characterize the ellipsometric parameters. Polarized light from a laser or incoherent source is collimated and reflected off of the surface under test. A modified Michelson interferometer is used in conjunction with a Wollaston prism to generate two interferograms with orthogonal polarization states. Subtraction of the phases in the two interferograms yields the ellipsometric parameter (Delta) . The fringe modulation of the two interferograms is used to calculate the ellipsometric parameter (Psi) . The instrument uses imaging optics to image the surface under test to a CCd, yielding a truly two dimensional ellipsometric measurement. The deign of the instrument and result of measurement will be presented.

Paper Details

Date Published: 3 October 1997
PDF: 6 pages
Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); doi: 10.1117/12.283853
Show Author Affiliations
Conrad Wells, Optical Sciences Ctr./Univ. of Arizona (United States)
James C. Wyant, Optical Sciences Ctr./Univ. of Arizona and WYKO Corp. (United States)

Published in SPIE Proceedings Vol. 3121:
Polarization: Measurement, Analysis, and Remote Sensing
Dennis H. Goldstein; Russell A. Chipman, Editor(s)

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