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Proceedings Paper

Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region
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Paper Abstract

Effects of defect propagation from the substrate throughout thin film single layer and multilayer coatings are investigated on fluoride and oxide films evaporated onto different types of substrates. Atomic force microscopy, light scattering methods, and transmission electron microscopy are used to study the surface morphology of the coated and uncoated substrates. With fluoride films, propagation of rough substrate structures is observed for both single layer films and multilayers. Oxide coatings replicate the microtopography even of well polished surfaces and throughout thick multilayer stacks.

Paper Details

Date Published: 22 September 1997
PDF: 8 pages
Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); doi: 10.1117/12.281375
Show Author Affiliations
Angela Duparre, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Stefan Jakobs, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Norbert Kaiser, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 3110:
10th Meeting on Optical Engineering in Israel
Itzhak Shladov; Stanley R. Rotman, Editor(s)

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