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Proceedings Paper

Noncontact testing of optical surfaces by multiple-wavelength light scattering measurement
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Paper Abstract

An instrument is described which enables the detection of backscattered light within a wide spectral region. The apparatus is based on a Coblentz sphere and is equipped with light sources from the UV to IR spectral region (248 nm to 10.6 micrometer). Results are reported of measurements on samples with different surface qualities such as supersmooth Si-wafers with sub-angstrom surface roughness, glass substrates, thin film optical components and machined surfaces. The set-up complies with a corresponding ISO project.

Paper Details

Date Published: 22 September 1997
PDF: 8 pages
Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); doi: 10.1117/12.281370
Show Author Affiliations
Angela Duparre, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Stefan Gliech, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 3110:
10th Meeting on Optical Engineering in Israel
Itzhak Shladov; Stanley R. Rotman, Editor(s)

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