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Proceedings Paper

Beam delivery focusing objectives for excimer laser micromachining applications
Author(s): Mark Percevault; Donald K. Wilson
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Paper Abstract

Although the use of UV excimer lasers in photo-ablation and exposure applications is becoming more frequent, optical objectives for such applications are not widely available. In addition, high power UV excimer laser radiation limits the optical designer's choice of suitable materials and other design options when designing the beam delivery focusing objective. Now, however, a line of UV achromatic focusing objectives has been designed for photo-ablation applications. Thoroughly tested in the field, they are available as off-the- shelf standard components. Data are presented below on focal spot sizes, energy densities, and other focal characteristics for specific applications.

Paper Details

Date Published: 22 September 1997
PDF: 8 pages
Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); doi: 10.1117/12.281353
Show Author Affiliations
Mark Percevault, Optics for Research, Inc. (United States)
Donald K. Wilson, Optics for Research, Inc. (United States)


Published in SPIE Proceedings Vol. 3110:
10th Meeting on Optical Engineering in Israel

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