Share Email Print

Proceedings Paper

Surface feature investigation using the optically measured sliding window spectrum
Author(s): Michael Friedmann; Joseph Shamir
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this work we present a method to investigate surface features based on the scanning of a focused beam over the surface and the interpretation of far field data. It is shown that the measured data is the sliding window spectrum (SWS) of the surface. Inspection of the SWS can be used to identify different surface features, and to perform high precision measurements for certain surface structures. By sampling adequately the SWS we measure the amplitude of the surface Gabor expansion coefficients and build the Gabor diagram. A projection onto constraint sets (POCS) algorithm is used to reconstruct the surface from the Gabor diagram. The constraints are provided by the physical characteristics of the surface and by the far field measurements. The projections between the constraint sets are implemented using the Gabor transform theory. Computer simulations and experimental results show that this method can reconstruct accurately shallow phase objects.

Paper Details

Date Published: 22 September 1997
PDF: 11 pages
Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); doi: 10.1117/12.281334
Show Author Affiliations
Michael Friedmann, Technion--Israel Institute of Technology (Israel)
Joseph Shamir, Technion--Israel Institute of Technology (Israel)

Published in SPIE Proceedings Vol. 3110:
10th Meeting on Optical Engineering in Israel
Itzhak Shladov; Stanley R. Rotman, Editor(s)

© SPIE. Terms of Use
Back to Top