Share Email Print
cover

Proceedings Paper

Micromachined aperture probe tip for multifunctional scanning probe microscopy
Author(s): Michael Abraham; Wolfgang Ehrfeld; Manfred Lacher; Othmar Marti; Karsten Mayr; Wilfried Noell; Peter Guethner; Joachim Barenz
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The paper presents a new concept of a micromachined integrated sensor for combined atomic force/near field optical microscopy. The sensor consists of a microfabricated cantilever with an integrated waveguide and a transparent near field aperture tip. The advantage compared to the fiber based near field tips is the high reproducibility of the aperture and the control of the tip-sample distance by the AFM-channel. The aperture tip is fabricated in a reliable batch process which has the potential for implementation in micromachining processes of scanning probe microscopy sensors and therefore leads to new types of multifunctional probes. For evaluation purposes, the tip was attached to an optical fiber by a microassembly setup and subsequently installed in a near-field scanning optical microscope. First measurements of topographical and optical near-field patterns demonstrate the proper performance of the hybrid probe.

Paper Details

Date Published: 24 September 1997
PDF: 9 pages
Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281234
Show Author Affiliations
Michael Abraham, Institute of Microtechnology Mainz GmbH (Germany)
Wolfgang Ehrfeld, Institute of Microtechnology Mainz GmbH (Germany)
Manfred Lacher, Institute of Microtechnology Mainz GmbH (Germany)
Othmar Marti, Univ. of Ulm (Germany)
Karsten Mayr, Institute of Microtechnology Mainz GmbH (Germany)
Wilfried Noell, Institute of Microtechnology Mainz GmbH (Germany)
Peter Guethner, Omicron Vakuumphysik GmbH (Germany)
Joachim Barenz, Univ. of Ulm (Germany)


Published in SPIE Proceedings Vol. 3099:
Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications

© SPIE. Terms of Use
Back to Top