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Proceedings Paper

Design, fabrication, and testing of micro-optical components for sensors and microsystems
Author(s): Reinhard Voelkel; Philippe Nussbaum; Jean-Christophe Roulet; Peter Blattner; Kenneth J. Weible; Hans Peter Herzig
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Paper Abstract

We report on our activities in the design, fabrication, characterization and system integration of planar micro- optical elements. Microlens arrays, gratings, diffusers, beam shapers and beam splitters have been fabricated, tested and integrated in chemical analysis systems ((mu) TAS, fluorescence detection), tracking sensors for satellites, displacement sensors, optical lightpipes, LCD projector illumination photospectrometers, neural networks and multiple channel imaging systems for photolithography. Packaging and alignment strategies for sensors and optical microsystems were investigated.

Paper Details

Date Published: 24 September 1997
PDF: 16 pages
Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281227
Show Author Affiliations
Reinhard Voelkel, Institute of Microtechnology/Univ. of Neuchatel (Switzerland)
Philippe Nussbaum, Institute of Microtechnology/Univ. of Neuchatel (Switzerland)
Jean-Christophe Roulet, Institute of Microtechnology/Univ. of Neuchatel (Switzerland)
Peter Blattner, Institute of Microtechnology/Univ. of Neuchatel (Switzerland)
Kenneth J. Weible, Weible OpTech (Switzerland)
Hans Peter Herzig, Institute of Microtechnology/Univ. of Neuchatel (Switzerland)


Published in SPIE Proceedings Vol. 3099:
Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications
Olivier M. Parriaux; Ernst-Bernhard Kley; Brian Culshaw; Magnus Breidne, Editor(s)

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