Share Email Print
cover

Proceedings Paper

Electrically tunable NIR spectrometer
Author(s): Kimmo Keraenen; Pentti Karioja; Outi Rusanen; Jussi Tenhunen; Martti Blomberg; Heikki Lehto
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The packaging of a miniaturized NIR-spectrometer is demonstrated. The heart of this NIR-spectrometer is an electrically tunable silicon surface micromachined Fabry- Perot interferometer (FPI). For reliable operation, the FPI device has to be mounted so that thermo-mechanical stresses are not present in its active area. This can be realized basically by mounting FPI on a substrate that has a thermal expansion coefficient close to silicon, using elastic material for mounting or minimizing the joint area between FPI and substrate. The FPI provides the possibility for the manufacturing of a miniaturized single-axis NIR-spectrometer for large-volume applications.

Paper Details

Date Published: 24 September 1997
PDF: 4 pages
Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281225
Show Author Affiliations
Kimmo Keraenen, VTT Electronics (Finland)
Pentti Karioja, VTT Electronics (Finland)
Outi Rusanen, VTT Electronics (Finland)
Jussi Tenhunen, VTT Electronics (Finland)
Martti Blomberg, VTT Electronics (Finland)
Heikki Lehto, VTT Electronics (Finland)


Published in SPIE Proceedings Vol. 3099:
Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications
Olivier M. Parriaux; Ernst-Bernhard Kley; Brian Culshaw; Magnus Breidne, Editor(s)

© SPIE. Terms of Use
Back to Top