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Proceedings Paper

Method for improving performance of IR focal plane array using microlens array
Author(s): Chunlei Du; Lurong Guo; Y. R. Wang; Lishu Zhou; G. L. Sun; Jin Zhang; X. D. Lin; Z. Li; Zhongbi Zhou
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Paper Abstract

An experiment which a diffractive microlens array on germanium is used for enhancing the fill factor of infrared focal plane array has been described in this paper. In order to achieve higher effective fill factor, the diffractive efficiency of each microlens and the transmissivity of the final element must be emphasized. The fabrication and the anti-reflection film evaporation for the diffractive microlens array have been studied. Based on a precise mechanics we have designed, a coupling experiment has been done and the main performance has been discussed. The fill factor of 80% is expected to be reached for the detector with original fill factor of 25%.

Paper Details

Date Published: 24 September 1997
PDF: 8 pages
Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281214
Show Author Affiliations
Chunlei Du, Institute of Optics and Electronics (China)
Lurong Guo, Sichuan Univ. (China)
Y. R. Wang, Institute of Optics and Electronics (China)
Lishu Zhou, Institute of Optics and Electronics (China)
G. L. Sun, Institute of Optics and Electronics (China)
Jin Zhang, Institute of Optics and Electronics (China)
X. D. Lin, Institute of Optics and Electronics (China)
Z. Li, Institute of Optics and Electronics (China)
Zhongbi Zhou, Sichuan Univ. (China)


Published in SPIE Proceedings Vol. 3099:
Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications
Olivier M. Parriaux; Ernst-Bernhard Kley; Brian Culshaw; Magnus Breidne, Editor(s)

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