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Proceedings Paper

Contactless embossing of microlenses: a new technology for manufacturing refractive microlenses
Author(s): Jens Schulze; Wolfgang Ehrfeld; Holger Loewe; Andreas Michel; Antoni Picard
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Paper Abstract

Contactless embossing of microlenses (CEM) is a new fabrication technique for the production of refractive microlens arrays. The basic idea is that the surface of the microlenses has no contact with the compression molding tool during the shaping of the surface relief. A high precision matrix of holes made by LIGA microfabrication is used as a compression molding tool. This tool is pressed onto a thermoplastic sample which is heated close to the material's transformation temperature. The material bulges into the openings of the molding tool due to the applied pressure. It process conditions are properly set, the material forms lens-like spherical structures. Microlenses and arrays of microlenses with lens diameters between 30 micrometers and 500 micrometers have been fabricated in thermoplastic material. Besides highly accurate microlens arrays, CEM also provides the potential of cost-effective production and high precision mounting concepts.

Paper Details

Date Published: 24 September 1997
PDF: 10 pages
Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281212
Show Author Affiliations
Jens Schulze, Institute of Microtechnology Mainz GmbH (Germany)
Wolfgang Ehrfeld, Institute of Microtechnology Mainz GmbH (Germany)
Holger Loewe, Institute of Microtechnology Mainz GmbH (Germany)
Andreas Michel, Institute of Microtechnology Mainz GmbH (Germany)
Antoni Picard, Institute of Microtechnology Mainz GmbH (Germany)


Published in SPIE Proceedings Vol. 3099:
Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications
Olivier M. Parriaux; Ernst-Bernhard Kley; Brian Culshaw; Magnus Breidne, Editor(s)

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