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Proceedings Paper

Crossed data processing in spectrally resolved white-light interferometry
Author(s): Carmen Sainz; Antonio L. Guerrero
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Paper Abstract

Spectrally resolved white-light interferometry has proved to be an absolute and precise tool for measuring optical delays. Hitherto, the bidimensional interferogram in the hybrid spatial-spectral domain, has been processed row by row as function of (sigma) , in order to obtain the map of the optical delay (Delta) (y). In this way, nanometric precision is obtained in profilometric studies. In this paper we show that more information an be obtained from the same interferogram when it is additionally processed column by column. This corresponds to the analysis of a sequence of monochromatic interferograms which are free from the classical ambiguities in the phase, since the preliminary row-by-row data processing along the spectral axis removed them. The absolute phase function thus obtained for each column at constant (sigma) yields the profile z(y). Statistical treatment of the overall information provided by this row by row plus column by column data processing increases precision in one order of magnitude. This paper presents the method and experimental results as well.

Paper Details

Date Published: 17 September 1997
PDF: 11 pages
Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281210
Show Author Affiliations
Carmen Sainz, Univ. Metropolitana (Venezuela)
Antonio L. Guerrero, Univ. Simon Bolivar (Venezuela)


Published in SPIE Proceedings Vol. 3098:
Optical Inspection and Micromeasurements II
Christophe Gorecki, Editor(s)

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