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Proceedings Paper

Interferometric characterization of stress birefringence in germanium
Author(s): Ben Depuydt; Pierre Michel Boone; Piet Union; Peter F. Muys; Dirk Vyncke; Claus Goessens
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Paper Abstract

We report on the characterization of the refractive index homogeneity in large blanks of Czochralski-grown Germanium, for thermal imaging use. With a phase-measuring Twyman-Green interferometer working at 10.6 micrometers , a map of the index of refraction with an accuracy better than 1 10-5 can be obtained for blanks which do not exhibit high birefringence.In the other case, principal stresses in the disks can be determined through the effect of birefringence on the interferogram, if the stresses are distributed cylinder-symmetrically in the plane of the disk. Relations between stresses, transmittance, and electrical resistivity of the material are observed.

Paper Details

Date Published: 17 September 1997
PDF: 7 pages
Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281204
Show Author Affiliations
Ben Depuydt, Univ. of Gent (Belgium)
Pierre Michel Boone, Univ. of Gent (Belgium)
Piet Union, Radius Engineering NV (Belgium)
Peter F. Muys, Radius Engineering NV (Belgium)
Dirk Vyncke, Union Miniere NV (Belgium)
Claus Goessens, Union Miniere NV (Belgium)


Published in SPIE Proceedings Vol. 3098:
Optical Inspection and Micromeasurements II
Christophe Gorecki, Editor(s)

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