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Proceedings Paper

Reflection and transmission imaging of nanostructures by an apertureless near-field optical microscope
Author(s): Reda Laddada; Pierre Michel Adam; Pascal Royer; Jean Louis Bijeon
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Paper Abstract

Scanning near-field optical microscopy (SNOM) has proved to be a powerful tool to analyze and image surfaces with high lateral resolution. We report a hybrid microscope composed of a commercial atomic force microscope (AFM) and an apertureless SNOM, which operates both in reflection and transmission modes with several illumination and collection systems. The optical probe is a commercial AFM tip integrated on a silicon cantilever. The AFM is operated in the intermittent contact mode at the resonance frequency of the cantilever. We present the first images obtained on a grating of cylindrical dots of aluminum and we discus their optical origin.

Paper Details

Date Published: 17 September 1997
PDF: 8 pages
Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281196
Show Author Affiliations
Reda Laddada, Univ. de Technologie de Troyes (France)
Pierre Michel Adam, Univ. de Technologie de Troyes (France)
Pascal Royer, Univ. de Technologie de Troyes (France)
Jean Louis Bijeon, Univ. de Technologie de Troyes (France)


Published in SPIE Proceedings Vol. 3098:
Optical Inspection and Micromeasurements II

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