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Proceedings Paper

Interferometric measurement of refractive index profiles for thin film characterization
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Paper Abstract

Laser interferometric methods for measurement of refractive index profiles of thin film structure have been investigated experimentally and by computer simulation. An expression for the axial image, which incorporates multiple reflections and refractive distortion, has been derived. An algorithm for reconstruction of the profile from an axial image has been developed. The limitations of this approach have been investigated. The optical system produces a high-pass filtered reconstruction of the refractive index profile. For the approximation when multiple scattering and refractive distortion can be neglected, the results have been generalized to the problem of measurement of 3D refractive index variations from 3D images.

Paper Details

Date Published: 17 September 1997
PDF: 8 pages
Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281190
Show Author Affiliations
Colin J. R. Sheppard, Univ. of Sydney and Australian Key Ctr. for Microscopy and Microanalysis (Australia)


Published in SPIE Proceedings Vol. 3098:
Optical Inspection and Micromeasurements II
Christophe Gorecki, Editor(s)

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