Share Email Print

Proceedings Paper

Interferometric displacement measurements performed with a self-mixing microinterferometer
Author(s): Johannes Roths; Martin Breinbauer; Bernhard Hilber; Christoph Gerz; Igor Koltchanov; Klaus Petermann
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Experimental results of linear displacement measurements performed with a new type of micro-interferometer are presented. This interferometer is base don the self-mixing effect in GaAlAs or InGaAlP diode lasers. The very simple interferometer design offers a number of advantages: it is small, rugged, easy to align and it consists of only a few optical components. With a new-developed two-tone modulation technique and signal processing algorithms, a direction- dependent interference signal can be generated with high signal-to-noise ratio. We present here theoretical and experimental investigations that allow the characterization of the laser operating conditions for a stable self-mixing interference signal. Both visible and near-IR Fabry-Perot diode lasers were tested and found to be suitable for self- mixing interferometry. The nonlinearity in the fringe interpolation was experimentally evaluated for the self- mixing micro-interferometer to be less than 10 nm. Improvements in the stability of the optical setup will further reduce this figure. The stability of the laser wavelength was shown to be in the order of 1 X 10-6. Intercomparison with other techniques, including glass scales and the 'Laser Stylus' RM600 LS, are discussed.

Paper Details

Date Published: 17 September 1997
PDF: 11 pages
Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281186
Show Author Affiliations
Johannes Roths, Kayser-Threde GmbH (Germany)
Martin Breinbauer, Kayser-Threde GmbH (Germany)
Bernhard Hilber, Kayser-Threde GmbH (Germany)
Christoph Gerz, Optoelektronische Sensoren (Germany)
Igor Koltchanov, Technische Univ. Berlin (Germany)
Klaus Petermann, Technische Univ. Berlin (Germany)

Published in SPIE Proceedings Vol. 3098:
Optical Inspection and Micromeasurements II
Christophe Gorecki, Editor(s)

© SPIE. Terms of Use
Back to Top