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Proceedings Paper

Original approach to an optically active silicon-based interferometric structure for sensing applications
Author(s): Christophe Gorecki; Eric Bonnotte; Hiroshi Toshioshi; Fred Benoit; Hideki Kawakatsu; Hiroyuki Fujita
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Paper Abstract

As a novelty application of Si-based integrated optics, the results of realization of a compact Mach-Zehnder interferometer will be presented. The deposition of a ZnO thin-film transducer on the reference arm of the interferometer will allow to transform this optically passive device in a device under an active sinusoidal phase modulation.

Paper Details

Date Published: 17 September 1997
PDF: 8 pages
Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281184
Show Author Affiliations
Christophe Gorecki, Univ. of Tokyo (France)
Eric Bonnotte, Univ. of Tokyo (Japan)
Hiroshi Toshioshi, Univ. of Tokyo (Japan)
Fred Benoit, Univ. of Tokyo (Japan)
Hideki Kawakatsu, Univ. of Tokyo (Japan)
Hiroyuki Fujita, Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 3098:
Optical Inspection and Micromeasurements II
Christophe Gorecki, Editor(s)

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