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Proceedings Paper

3D-deformation analysis of microcomponents using digital holography
Author(s): Soenke Seebacher; Wolfgang Osten; Werner P. O. Jueptner
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Paper Abstract

Holographic interferometry is widely used as contactless method in experimental mechanics and non-destructive testing of materials and engineering components. But measuring the full 3D-deformation of the object's surface requires a complicated optical setup with at least three different illumination directions.Especially if micro-components with lateral extensions less than 10mm have to be examined the simple use of conventional holography becomes more and more a problem. Since high resolution CCD cameras are available for reasonable prices, digital holography can be used as a fast, easy and precise method for holographic interferometry. Compact and simple setups can be achieved by the use of fiber optics. Digital holography replaces the holographic plate by a CCD matrix. No additional magnifying optical components are needed to achieve lateral resolutions of about 5 micrometers and deformation resolution of 15nm. Some experiments using four illumination direction in an optimized setup are presented. They show the 3D-deformation fields of small objects under a given load. The results are compared with computer simulations to receive material parameters.

Paper Details

Date Published: 17 September 1997
PDF: 10 pages
Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281183
Show Author Affiliations
Soenke Seebacher, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Wolfgang Osten, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Werner P. O. Jueptner, Bremer Institut fuer Angewandte Strahltechnik (Germany)

Published in SPIE Proceedings Vol. 3098:
Optical Inspection and Micromeasurements II
Christophe Gorecki, Editor(s)

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