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Proceedings Paper

Microelectromechanical systems (MEMS) and their photonic application
Author(s): Yuji Uenishi; Koji Akimoto; Shinji Nagaoka
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Paper Abstract

THe fabrication of tunable optical devices by using Si free- space micro-optics and Ni micromirrors has demonstrated the applicability of MEMS technologies to photonic devices. Compact, multi-functional, assembly-free, micro-optical systems have been developed by using MEMS technologies to integrate optical devices and micromechanics onto the same wafer. A high aspect-ratio Si plate which works as a beam splitter has been fabricated using Si micromachining. A tunable laser diode with an external Si mirror has been fabricated and shown to have wavelength tunability. A Ni micromirror with comb-drive actuator has been developed and applied it to both a tunable optical filter and a tunable laser diode. Due to the precise motion of the micromirror, accurate optical tunability has been obtained.

Paper Details

Date Published: 17 September 1997
PDF: 8 pages
Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281182
Show Author Affiliations
Yuji Uenishi, NTT Opto-Electronics Labs. (Japan)
Koji Akimoto, NTT Opto-Electronics Labs. (Japan)
Shinji Nagaoka, NTT Opto-Electronics Labs. (Japan)


Published in SPIE Proceedings Vol. 3098:
Optical Inspection and Micromeasurements II
Christophe Gorecki, Editor(s)

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