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Proceedings Paper

Comparison of the moire two-beam phase-stepping and Fourier transform method techniques in Fizeau interferometry
Author(s): Benito Vasquez Dorrio; Jose Carlos Lopez Vazquez; Jose M. Alen; J. Bugarin; Antonio Fernandez; Angel F. Doval; Jesus Blanco-Garcia; Mariano Perez-Amor; J. L. Fernandez
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Paper Abstract

We have previously proposed a phase evaluation method of multiple-beam Fizeau patterns that combines the two-beam phase-stepping algorithms with the more effect. This method is based on a multiplicative moire image formation process obtained y the direct superposition of high-frequency multiple-beam Fizeau carrier fringes on a transmission grating. In this paper the contrast between this Moire two- beam phase-stepping technique and the direct evaluation of the high-frequency multiple-beam Fizeau carrier fringes by means of the Fourier Transform Method is presented.

Paper Details

Date Published: 17 September 1997
PDF: 9 pages
Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281167
Show Author Affiliations
Benito Vasquez Dorrio, Univ. de Vigo (Spain)
Jose Carlos Lopez Vazquez, Univ. de Vigo (Spain)
Jose M. Alen, Univ. de Vigo (Spain)
J. Bugarin, Univ. de Vigo (Spain)
Antonio Fernandez, Univ. de Vigo (Spain)
Angel F. Doval, Univ. de Vigo (Spain)
Jesus Blanco-Garcia, Univ. de Vigo (Spain)
Mariano Perez-Amor, Univ. de Vigo (Spain)
J. L. Fernandez, Univ. de Vigo (Spain)


Published in SPIE Proceedings Vol. 3098:
Optical Inspection and Micromeasurements II
Christophe Gorecki, Editor(s)

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