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Proceedings Paper

Three-dimensional analysis of machined surfaces by scatterometry
Author(s): Jorg W. Baumgart; Horst Truckenbrodt
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Paper Abstract

The analysis of scattered light is a well known method for the inspection of very smooth surfaces. Some new methods of data analysis have now widened its utilization to rough and very rough surfaces. Even if no generalized solutionis available it is possible to determine any surface parameter in certain applications. Especially for process control purposes, scatterometry can be a fast, contactless and reliable method to measure deviations form rated values and to detect machining errors. In this paper, the method and its application to honed, polished and turned surfaces are presented. Amplitude as well as spatial parameters of the surfaces microtopography will be determined and compared to those obtained by other methods.

Paper Details

Date Published: 17 September 1997
PDF: 9 pages
Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281151
Show Author Affiliations
Jorg W. Baumgart, Technical Univ. of Ilmenau (Germany)
Horst Truckenbrodt, Technical Univ. of Ilmenau (Germany)


Published in SPIE Proceedings Vol. 3098:
Optical Inspection and Micromeasurements II
Christophe Gorecki, Editor(s)

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