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Proceedings Paper

Advanced concepts for UV laser beam shaping with non-rotationally symmetric optical elements
Author(s): Lars Unnebrink; Thomas F. E. Henning; Marcus Scholl; Ernst-Wolfgang Kreutz
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Paper Abstract

The potential of non-rotationally symmetric optical elements (NOEs) is demonstrated with respect to mask projection techniques with UV excimer laser radiation. NOEs are diamond turned mirrors with an almost arbitrary surface shape. The operation principle of the NOEs presented here is the concept of beam integration including beamlet shaping. Efficient and innovative processing is enabled by generating complex beam profiles adapted to the mask apertures demonstrated for the generation an annular shaped beam profile.

Paper Details

Date Published: 18 August 1997
PDF: 7 pages
Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); doi: 10.1117/12.281092
Show Author Affiliations
Lars Unnebrink, Rheinisch-Westfaelische Technische Hochschule (Germany)
Thomas F. E. Henning, Fraunhofer-Institut fuer Lasertechnik (Germany)
Marcus Scholl, DLR Institut fuer Technische Physik (Germany)
Ernst-Wolfgang Kreutz, Rheinisch-Westfaelische Technische Hochschule Aachen (Germany)

Published in SPIE Proceedings Vol. 3097:
Lasers in Material Processing
Leo H. J. F. Beckmann, Editor(s)

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