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Proceedings Paper

Laser beam removal of microstructures with Nd:YAG lasers
Author(s): Dirk Hellrung; Arnold Gillner; Reinhart Poprawe
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Paper Abstract

Laser beam removal with Nd:YAG-lasers is a manufacturing method to produce micro-structures with the precision of a few micrometers. Because many materials can be structured with laser radiation, especially hard metals and ceramics, it is a very flexible technology for the production of tools for micro-embossing and micro-stamping. The combination of the laser and stamping technology offers the possibility to produce high quantities of micro-parts at moderate costs. A system for laser beam removal, existing of a handling with a CAD/CAM coupling and a diode pumped solid state laser was developed and in several investigations the quality of these micro-tools was tested.

Paper Details

Date Published: 18 August 1997
PDF: 7 pages
Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); doi: 10.1117/12.281085
Show Author Affiliations
Dirk Hellrung, Fraunhofer-Institut fuer Lasertechnik (Germany)
Arnold Gillner, Fraunhofer-Institut fuer Lasertechnik (Germany)
Reinhart Poprawe, Fraunhofer-Institut fuer Lasertechnik (Germany)

Published in SPIE Proceedings Vol. 3097:
Lasers in Material Processing
Leo H. J. F. Beckmann, Editor(s)

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