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Proceedings Paper

Field electron emission from highly graphitic diamond films
Author(s): Binglin Zhang; Ning Yao; Yunjun Li; Jintian He; Xiaoping Wang
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Paper Abstract

The diamond films were prepared by a microwave chemical vapor deposition system. The molybdenum substrates were used. The x-ray diffraction spectra of the films contain peaks of the (111) and (220) facets of diamond. Scanning electron microscope and optical mecrograph reveal that the films consist of ball-like carbon structure, and diamond grains embedded on the balls. Raman spectra and surface resistance measurement also indicate that the films are highly graphitic diamond films. The field emitter was made of the diamond-ball like carbon film cathode and ITO anode. The transparent conducting anode technique was used to measure the 1-V curves and the emission sites. The measurements were operated in a vacuum system with a base pressure of 10-4 torr. The turn-on field of 10 V/micrometers was obtained. After Ar+ ion impacting the highly graphitic diamond film cathode, the turn-on field was increased dramatically to 22 V/micrometers . The good quality diamond film emitter was also reported.

Paper Details

Date Published: 18 August 1997
PDF: 4 pages
Proc. SPIE 3184, Microelectronic Packaging and Laser Processing, (18 August 1997); doi: 10.1117/12.280578
Show Author Affiliations
Binglin Zhang, Zhengzhou Univ. (China)
Ning Yao, Zhengzhou Univ. (China)
Yunjun Li, Zhengzhou Univ. (China)
Jintian He, Zhengzhou Univ. (China)
Xiaoping Wang, Zhengzhou Institute of Aeronautical Industrial Management (China)

Published in SPIE Proceedings Vol. 3184:
Microelectronic Packaging and Laser Processing
Yong Khim Swee; HongYu Zheng; Ray T. Chen, Editor(s)

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