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Proceedings Paper

Scribing of ITO coatings using a Q-switched Nd:YAG laser
Author(s): Siu Chung Tam; Yihong Chen; HongYu Zheng; W. L. Chen
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Paper Abstract

This paper describes the result of optimizing three process variable to achieve a narrow line width in laser engraving of ITO conductive coatings using the Taguchi technique of experimental design. The laser used is a NEC Q-switched continuous wave Nd:YAG laser operating at a wavelength of 1.064 micrometers . The three process variables explored are: Q- switch frequency, speed of X-Y stage, and attenuator ratio of laser power. The various parameters were assigned to an L9 orthogonal array. The experiments were conducted with two repetitions each of which employs complete randomization. It was found that a narrow line width could be achieved with a Q-switch frequency of 25 kHz, scribing speed of 2000 mm/min, and beam attenuator setting of 35. A confirmation experiment was carried out and the results fell within the predicted 95 percent confidence interval.

Paper Details

Date Published: 18 August 1997
PDF: 9 pages
Proc. SPIE 3184, Microelectronic Packaging and Laser Processing, (18 August 1997); doi: 10.1117/12.280572
Show Author Affiliations
Siu Chung Tam, Nanyang Technological Univ. (Singapore)
Yihong Chen, Gintic Institute of Manufacturing Technology (Singapore)
HongYu Zheng, Gintic Institute of Manufacturing Technology (Singapore)
W. L. Chen, Waterjet International Pte Ltd. (Singapore)


Published in SPIE Proceedings Vol. 3184:
Microelectronic Packaging and Laser Processing
Yong Khim Swee; HongYu Zheng; Ray T. Chen, Editor(s)

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