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Proceedings Paper

Excimer laser irradiation on NiP surface
Author(s): Daming Liu; Yongfeng Lu; K. Y. Yiang; Wen Dong Song; Minghui Hong; Tohsiew Low
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Paper Abstract

In this study, nickel-phosphorus (NiP) surface is irradiate by a KrF excimer laser beam. Atomic force microscope and x- ray diffraction are employed to study the surface morphology and the material structure. For laser fluence form 124 mJ/cm2, thin periodic structure morphology is formed in the irradiated region. When laser fluence exceeds 200 mJ/cm2, a microcosmic-smooth ripple morphology is obtained. The period of the second morphology is obviously larger than that of the first morphology. The morphology is dependent on the original surface condition, laser fluence and laser pulse number in the low laser fluence region and only laser fluence and laser pulse number in the high laser fluence region. 1D thermal conduction model is used to predict the temperature rise in the irradiated region. Surface melting is predicted to take place at laser fluence about 200 mJ/cm2. The interaction mechanism between laser beam and NiP surface is proposed based on the theoretical calculation and experiment.

Paper Details

Date Published: 18 August 1997
PDF: 9 pages
Proc. SPIE 3184, Microelectronic Packaging and Laser Processing, (18 August 1997); doi: 10.1117/12.280570
Show Author Affiliations
Daming Liu, National Univ. of Singapore (Singapore)
Yongfeng Lu, National Univ. of Singapore (Singapore)
K. Y. Yiang, National Univ. of Singapore (Singapore)
Wen Dong Song, National Univ. of Singapore (Singapore)
Minghui Hong, National Univ. of Singapore (Singapore)
Tohsiew Low, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 3184:
Microelectronic Packaging and Laser Processing
Yong Khim Swee; HongYu Zheng; Ray T. Chen, Editor(s)

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