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Proceedings Paper

Laser molecular beam epitaxy of BaTiO3 thin films
Author(s): Dafu Cui; Hui-sheng Wang; K. Ma; Zhenghao Chen; Yueliang Zhou; Huibin Lu; Lijuan Li; Guozhen Yang
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Paper Abstract

Atomic-scale epitaxial BaTiO3 (BTO) thin films were grown on SrTiO3 (STO) substrate by computer-controlled laser molecular beam epitaxial system. The crystal quality, surface and interface microstructure of the laser MBE BTO thin film has been investigated by in-situ reflection high- energy electron diffraction, x-ray diffraction, transmission electron microscope and atomic force microscope. We find that the laser MBE BTO thin film prepared at ozone pressure of 10-6 Torr and at STO substrate temperature of 750 degrees C has highly c-axis oriented tetragonal phase and single crystal structure, the BTO/STO interface is abrupt, and the surface of the BTO thin film shows atomically smooth.

Paper Details

Date Published: 26 August 1997
PDF: 4 pages
Proc. SPIE 3182, Material Science and Material Properties for Infrared Optoelectronics, (26 August 1997); doi: 10.1117/12.280465
Show Author Affiliations
Dafu Cui, Institute of Physics (China)
Hui-sheng Wang, Institute of Physics (China)
K. Ma, Institute of Physics (China)
Zhenghao Chen, Institute of Physics (China)
Yueliang Zhou, Institute of Physics (China)
Huibin Lu, Institute of Physics (China)
Lijuan Li, Institute of Physics (China)
Guozhen Yang, Institute of Physics (China)


Published in SPIE Proceedings Vol. 3182:
Material Science and Material Properties for Infrared Optoelectronics
Fiodor F. Sizov; Vladimir V. Tetyorkin, Editor(s)

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