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Proceedings Paper

Influence of bias heating on a titanium bolometer infrared sensor
Author(s): Akio Tanaka; Shouhei Matsumoto; Nanao Tsukamoto; Shigeyuki Itoh; Kazuhiro Chiba; Tsutomu Endoh; Akihiro Nakazato; Kuniyuki Okuyama; Yuuichi Kumazawa; Minoru Hijikawa; Hideki Gotoh; Takanori Tanaka; Nobukazu Teranishi
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Paper Abstract

A 128 by 128 pixel bolometer infrared focal plane array using thin film titanium has been developed. The device is a monolithically integrated structure with a titanium bolometer detector located over a CMOS circuit that reads out the bolometer's signals. Since the thermal conductance of the bolometer detector is minimized, the temperature of the detector itself is increased by applying the bias current. Under the present operating conditions of the titanium bolometer, this temperature increase becomes about 30 degrees Celsius. The influence of this bias heating on device destruction and degradation was experimentally investigated and is discussed. The noise equivalent temperature difference obtained with the device is 0.07 degrees Celsius. Since the fabrication process is silicon-process compatible, costs can be kept low.

Paper Details

Date Published: 13 August 1997
PDF: 12 pages
Proc. SPIE 3061, Infrared Technology and Applications XXIII, (13 August 1997); doi: 10.1117/12.280339
Show Author Affiliations
Akio Tanaka, NEC Corp. (Japan)
Shouhei Matsumoto, NEC Corp. (Japan)
Nanao Tsukamoto, NEC Aerospace Systems (Japan)
Shigeyuki Itoh, NEC Corp. (Japan)
Kazuhiro Chiba, NEC Corp. (Japan)
Tsutomu Endoh, NEC Corp. (Japan)
Akihiro Nakazato, NEC Corp. (Japan)
Kuniyuki Okuyama, NEC Corp. (Japan)
Yuuichi Kumazawa, Nippon Systemware Co. Ltd. (Japan)
Minoru Hijikawa, NEC Corp. (Japan)
Hideki Gotoh, NEC Glass Components, Ltd. (Japan)
Takanori Tanaka, NEC Corp. (Japan)
Nobukazu Teranishi, NEC Corp. (Japan)


Published in SPIE Proceedings Vol. 3061:
Infrared Technology and Applications XXIII
Bjorn F. Andresen; Marija Strojnik, Editor(s)

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