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Proceedings Paper

Quantitative and imaging performance of uncooled microbolometer sensors
Author(s): Charles A. Marshall; Thomas B. Breen; Margaret Kohin; Walter Watson; Robert Murphy; Neal R. Butler; Todd W. Parker; Lou Perich
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Paper Abstract

Lockheed Martin IR Imaging Systems is developing low cost, high performance, uncooled infrared imaging products for both military and commercial applications. These products are based on the microbolometer technology, a silicon micromachined sensor that combines wafer level silicon processing with a device structure capable of yielding excellent imaging performance. Here we report on the latest technical improvements and performance of an uncooled sensor as measured through laboratory and field testing. The performance of our uncooled sensor has been measured to determine sensor capabilities for insertion into both military and commercial products. Linearity of the sensor over a scene temperature range of 95 degrees Celsius is less than 0.5%. Our sensors typically have temporal NETDs of less than 70 mK as well as spatial NETDs of less than 50 mK. MRTD performance is less than 0.4 degrees Celsius at spatial frequencies more than 20% beyond Nyquist. Sensor stability over time has been measured and found to meet both commercial and military requirements. Spatial noise over a wide scene temperature range is reported as well as other test results. Video is used to demonstrate sensor performance capabilities in a variety of applications.

Paper Details

Date Published: 13 August 1997
PDF: 7 pages
Proc. SPIE 3061, Infrared Technology and Applications XXIII, (13 August 1997); doi: 10.1117/12.280338
Show Author Affiliations
Charles A. Marshall, Lockheed Martin IR Imaging Systems (United States)
Thomas B. Breen, Lockheed Martin IR Imaging Systems (United States)
Margaret Kohin, Lockheed Martin IR Imaging Systems (United States)
Walter Watson, Lockheed Martin IR Imaging Systems (United States)
Robert Murphy, Lockheed Martin IR Imaging Systems (United States)
Neal R. Butler, Lockheed Martin IR Imaging Systems (United States)
Todd W. Parker, Lockheed Martin IR Imaging Systems (United States)
Lou Perich, Lockheed Martin IR Imaging Systems (United States)


Published in SPIE Proceedings Vol. 3061:
Infrared Technology and Applications XXIII
Bjorn F. Andresen; Marija Strojnik, Editor(s)

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