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Proceedings Paper

Ellipsometry as a characterization technique
Author(s): Vo-Van Truong; Le-quang Nguyen
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Paper Abstract

A brief historical background of ellipsometry is given, followed by a detailed assessment of its current status and future development. Spectroscopic ellipsometry in the near UV-VIS is now a well-established characterization technique, and its extension to the IR range is quickly reaching a mature state. Other important developments in both theory and instrumentation in the last decade are leading to better and faster in situ, real-time and imaging ellipsometry. Selected works from recent literature are presented to illustrate not only new development trends in the field but also other well-known applications of ellipsometry as a characterization technique.

Paper Details

Date Published: 30 July 1997
PDF: 25 pages
Proc. SPIE 10291, Materials Characterization and Optical Probe Techniques: A Critical Review, 102910L (30 July 1997); doi: 10.1117/12.279849
Show Author Affiliations
Vo-Van Truong, Univ. de Moncton (Canada)
Le-quang Nguyen, Nanoptix Inc. (Canada)

Published in SPIE Proceedings Vol. 10291:
Materials Characterization and Optical Probe Techniques: A Critical Review
Roger A. Lessard; Hilmar Franke, Editor(s)

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