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Proceedings Paper

Surface analysis with scanning probe microscopy
Author(s): Todd G. Ruskell
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Paper Abstract

Scanning probe microscopy is reviewed, including some of the abilities of scanning tunneling microscopy and spectroscopy. The technology of atomic force microscopy is discussed, including tip and cantilever fabrication and preparation, as well as a variety of detection schemes to measure cantilever deflection. Several atomic force microscopy techniques, including constant force imaging, interleaved imaging, resonantly-enhanced imaging, adhesion force microscopy and friction force microscopy are also reviewed. Finally, two important applications of scanning probe microscopy, magnetic force and scanning capacitance microscopy, are discussed.

Paper Details

Date Published: 30 July 1997
PDF: 24 pages
Proc. SPIE 10291, Materials Characterization and Optical Probe Techniques: A Critical Review, 102910F (30 July 1997); doi: 10.1117/12.279843
Show Author Affiliations
Todd G. Ruskell, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 10291:
Materials Characterization and Optical Probe Techniques: A Critical Review
Roger A. Lessard; Hilmar Franke, Editor(s)

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