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Proceedings Paper

Characterization of optical materials using Auger electron spectroscopy
Author(s): Mark R. Davidson; Paul H. Holloway
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Paper Abstract

Auger electron spectroscopy is one of the most commonly used techniques for surface analysis. It has evolved from its first common use for solid surfaces in the late 1960s to become a tool for routine analysis of materials. This article provides a concise review of the use of Auger electron spectroscopy, with emphasis on its use for optical materials. The fundamentals of the technique are reviewed, along with a discussion of data analysis and the equipment commonly used to perform the technique. Several examples of the use of AES for optical materials are discussed.

Paper Details

Date Published: 30 July 1997
PDF: 29 pages
Proc. SPIE 10291, Materials Characterization and Optical Probe Techniques: A Critical Review, 102910E (30 July 1997); doi: 10.1117/12.279842
Show Author Affiliations
Mark R. Davidson, Univ. of Florida (United States)
Paul H. Holloway, Univ. of Florida (United States)


Published in SPIE Proceedings Vol. 10291:
Materials Characterization and Optical Probe Techniques: A Critical Review
Roger A. Lessard; Hilmar Franke, Editor(s)

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