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Proceedings Paper

SEM techniques for materials characterization
Author(s): Jacques Beauvais; Dominique Drouin; Raynald Gauvin
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Paper Abstract

The scanning electron microscope (SEM) can be used to study and characterize a wide variety of materials used in photonic applications. These range from highly conductive samples to insulating materials. Several different techniques make use of this versatile tool. These include secondary electron imaging, backscattered electron imaging, X-ray analysis (both qualitative and quantitative), electron channeling patterns for studying crystalline materials, charge collection techniques for semiconductor samples and cathodoluminescence. These techniques will be described here with examples of applications. In addition, electron-matter interactions as well as the basic operation principles of the scanning electron microscope will be discussed.

Paper Details

Date Published: 30 July 1997
PDF: 25 pages
Proc. SPIE 10291, Materials Characterization and Optical Probe Techniques: A Critical Review, 102910B (30 July 1997); doi: 10.1117/12.279839
Show Author Affiliations
Jacques Beauvais, Univ. de Sherbrooke (Canada)
Dominique Drouin, Univ. de Sherbrooke (Canada)
Raynald Gauvin, Univ. de Sherbrooke (Canada)

Published in SPIE Proceedings Vol. 10291:
Materials Characterization and Optical Probe Techniques: A Critical Review
Roger A. Lessard; Hilmar Franke, Editor(s)

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