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Proceedings Paper

Miniature scanning electron microscope design based upon the use of permanent magnets
Author(s): Anjam Khursheed; John T. L. Thong; J. C. H. Phang; I. P. Ong
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Paper Abstract

A table top SEM design has been presented which is based upon the use of permanent magnets. The SEM's height can be designed to be below 12 cm. Computer simulations predict that the SEM should be able to provide high spatial resolution and operate at primary beam voltages above 100 kV for thin specimens.

Paper Details

Date Published: 25 September 1997
PDF: 10 pages
Proc. SPIE 3155, Charged Particle Optics III, (25 September 1997); doi: 10.1117/12.279395
Show Author Affiliations
Anjam Khursheed, National Univ. of Singapore (Singapore)
John T. L. Thong, National Univ. of Singapore (Singapore)
J. C. H. Phang, National Univ. of Singapore (Singapore)
I. P. Ong, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 3155:
Charged Particle Optics III
Eric Munro, Editor(s)

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