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Proceedings Paper

Recording grooves for fiber-chip coupling in PMMA using KrF excimer laser radiation: experiment and simulation
Author(s): Tomas R. Sterkenburgh; Hilmar Franke; M. G. Becker; W. Garen; Werner F. Frank
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Paper Abstract

Working with silica the technique of anisotropic etching produces 'V'-shaped grooves which are suitable for fiber chip coupling.In this paper similar grooves are fabricated in PMMA using self developing excimer-laser etching in combination with a cylindric lens. The actually fabricated shape ranging from 'V' to 'U' is investigated by different technical means. The dimensions are determined as a function of the parameter number of pulses. A multi pulse technique implying a lateral displacement is investigated for the fine tuning of the pattern. Simulations using two finite difference methods allow the theoretical prediction of etched patterns.

Paper Details

Date Published: 22 September 1997
PDF: 10 pages
Proc. SPIE 3135, Precision Plastic Optics for Optical Storage, Displays, Imaging, and Communications, (22 September 1997); doi: 10.1117/12.279147
Show Author Affiliations
Tomas R. Sterkenburgh, Gerhard-Mercator-Univ.-Gesamthochschule Duisburg (Germany)
Hilmar Franke, Gerhard-Mercator-Univ.-Gesamthochschule Duisburg (Germany)
M. G. Becker, Fachhochschule Ostfriesland/Emden (Germany)
W. Garen, Fachhochschule Ostfriesland/Emden (Germany)
Werner F. Frank, Technologiezentrum Deutsche Telekom AG (Germany)

Published in SPIE Proceedings Vol. 3135:
Precision Plastic Optics for Optical Storage, Displays, Imaging, and Communications
Werner F. Frank, Editor(s)

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