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Proceedings Paper

Vibration stabilization of a phase-shifting interferometer for large optics
Author(s): Glen C. Cole; James H. Burge; Lee R. Dettmann
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Paper Abstract

Phase shifting interferometry requires an intentional shifting of the relative phase between the reference arm and the test arm of fan interferometry. Vibration can lead to uncertainty in the relative phase difference with respect to time and result in erroneous surface measurements. We have developed a method for actively compensating for vibration using a closed-loop phase servo system. An essential feature of this is a high frequency phase measurement. The phase is modulated and the intensity variations are measured with a high sped photodiode and digitized. This information is processed by a DSP and a five step algorithm is used to determine the instantaneous phase. These high speed phase measurements are used in a closed loop phase servo to compensate for vibration and also allow for phase shifting interferometry. Test results with and without the vibration compensation will be presented.

Paper Details

Date Published: 1 November 1997
PDF: 9 pages
Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.279132
Show Author Affiliations
Glen C. Cole, Eastman Kodak Co. (United States)
James H. Burge, Univ. of Arizona (United States)
Lee R. Dettmann, Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 3134:
Optical Manufacturing and Testing II
H. Philip Stahl, Editor(s)

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