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Proceedings Paper

Linear motion machine for soft x-ray interferometry
Author(s): Robert M. Duarte; Malcolm R. Howells; Zahid Hussain; Ted Lauritzen; R. McGill; Edward J. Moler; John Spring
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Paper Details

Date Published: 13 October 1997
PDF: 9 pages
Proc. SPIE 3132, Optomechanical Design and Precision Instruments, (13 October 1997); doi: 10.1117/12.279100
Show Author Affiliations
Robert M. Duarte, Lawrence Berkeley National Lab. (United States)
Malcolm R. Howells, Lawrence Berkeley National Lab. (United States)
Zahid Hussain, Lawrence Berkeley National Lab. (United States)
Ted Lauritzen, Lawrence Berkeley National Lab. (United States)
R. McGill, Lawrence Berkeley National Lab. (United States)
Edward J. Moler, Lawrence Berkeley National Lab. (United States)
John Spring, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 3132:
Optomechanical Design and Precision Instruments
Alson E. Hatheway, Editor(s)

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