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Bidirectional ellipsometry and its application to the characterization of surfaces
Author(s): Thomas A. Germer; Clara C. Asmail
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Paper Abstract

The polarization of light scattered out of the pane of incidence was measured from rough and microrough silicon, polished fused silica and glass ceramic, and ground and polished black glass. The measurement defects, demonstrating that the polarization light can be used to distinguish between microroughness and subsurface defects.

Paper Details

Date Published: 3 October 1997
PDF: 10 pages
Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); doi: 10.1117/12.278968
Show Author Affiliations
Thomas A. Germer, National Institute of Standards and Technology (United States)
Clara C. Asmail, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 3121:
Polarization: Measurement, Analysis, and Remote Sensing
Dennis H. Goldstein; Russell A. Chipman, Editor(s)

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