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Proceedings Paper

Single-photon avalanche detectors for low-light-level imaging
Author(s): Alan P. Morrison; Vasileios S. Sinnis; Alan Mathewson; Franco Zappa; Laura Varisco; Massimo Ghioni; Sergio D. Cova
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Paper Abstract

Linear arrays of single photon avalanche detectors (SPADs) designed for use in low light level imaging applications were fabricated using a novel planar process that is compatible with standard CMOS technology. The device characteristics for these arrays are presented here to investigate their suitability for high efficiency low light level imaging. A new scheme is proposed to eliminate the problem of optical crosstalk between pixels in the array by introducing a trench isolation process coupled with silicon-on-insulator (SOI) technology.

Paper Details

Date Published: 15 October 1997
PDF: 8 pages
Proc. SPIE 3114, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII, (15 October 1997); doi: 10.1117/12.278896
Show Author Affiliations
Alan P. Morrison, National Microelectronics Research Ctr. (Ireland)
Vasileios S. Sinnis, National Microelectronics Research Ctr. (Ireland)
Alan Mathewson, National Microelectronics Research Ctr. (Ireland)
Franco Zappa, Politecnico di Milano (Italy)
Laura Varisco, Politecnico di Milano (Italy)
Massimo Ghioni, Politecnico di Milano (Italy)
Sergio D. Cova, Politecnico di Milano (Italy)

Published in SPIE Proceedings Vol. 3114:
EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII
Oswald H. W. Siegmund; Mark A. Gummin, Editor(s)

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