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Proceedings Paper

Nonspecular scattering from multilayer mirrors at normal incidence
Author(s): Eric M. Gullikson; Daniel Gorman Stearns; David P. Gaines; James H. Underwood
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Paper Abstract

The first measurements are reported of non-specular scattering of EUV radiation normally incident on a multilayer mirror. The scattering from a Mo/Si multilayer mirror has been measured as a function of angle and wavelength. A peak in the angular distribution of scattered light is observed which is due to the correlation of the roughness of different interfaces. The scattering from correlated roughness can be described by a simple kinematic theory of scattering. In the region of the Bragg reflectivity peak dynamical effects lead to a reduction in the scattering from the simple kinematic theory. The total integrated scatter (TIS) has been measured and is found to peak on the short wavelength side of the Bragg peak. The TIS is less than 1% of the incident intensity.

Paper Details

Date Published: 11 July 1997
PDF: 8 pages
Proc. SPIE 3113, Grazing Incidence and Multilayer X-Ray Optical Systems, (11 July 1997); doi: 10.1117/12.278882
Show Author Affiliations
Eric M. Gullikson, Lawrence Berkeley National Lab. (United States)
Daniel Gorman Stearns, Lawrence Livermore National Lab. (United States)
David P. Gaines, Lawrence Livermore National Lab. (United States)
James H. Underwood, Lawrence Berkeley National Lab. (United States)

Published in SPIE Proceedings Vol. 3113:
Grazing Incidence and Multilayer X-Ray Optical Systems
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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