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Proceedings Paper

Density vs Ar-pressures for optimization of DC-magnetron sputter deposition of Ni/C multilayers for hard x-ray telescopes
Author(s): Ahsen M. Hussain; Suzanne E. Romaine; Paul Gorenstein; John E. Everett; Ricardo J. Bruni; Anna M. Clark; Michael F. Ruane; Y. Fedyunin
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Paper Abstract

The influence of varying the Ar-pressure in the process of depositing Ni/C multilayers by dc-magnetron sputtering has been studied, and atomic force microscopy (AFM) measurements, x-ray characterization results and transmission electron microscopy (TEM) results are presented. Single Ni and C films and Ni/C multilayers were deposited at Ar-pressures of 1.5, 3, 5 and 7 mTorr. The one-dimensional power spectral density data from the AFM measurements clearly indicate that the best densities and thin film qualities for both materials are obtained at lower Ar-pressure, i.e. 1.5 mTorr.

Paper Details

Date Published: 11 July 1997
PDF: 7 pages
Proc. SPIE 3113, Grazing Incidence and Multilayer X-Ray Optical Systems, (11 July 1997); doi: 10.1117/12.278855
Show Author Affiliations
Ahsen M. Hussain, Harvard-Smithsonian Ctr. for Astrophysics and Danish Space Research Institute (Denmark)
Suzanne E. Romaine, Harvard-Smithsonian Ctr. for Astrophysics (United States)
Paul Gorenstein, Harvard-Smithsonian Ctr. for Astrophysics (United States)
John E. Everett, Harvard-Smithsonian Ctr. for Astrophysics (United States)
Ricardo J. Bruni, Harvard-Smithsonian Ctr. for Astrophysics (United States)
Anna M. Clark, Harvard-Smithsonian Ctr. for Astrophysics (United States)
Michael F. Ruane, Boston Univ. (United States)
Y. Fedyunin, Boston Univ. (United States)


Published in SPIE Proceedings Vol. 3113:
Grazing Incidence and Multilayer X-Ray Optical Systems
Richard B. Hoover; Arthur B. C. Walker II, Editor(s)

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